.245
a	FUNDAMENTALS Aspect of REaction in Titanium-Silicon Thin Films for Integrated Circuits
h	Book
.100
a	RAAIJMAKERS, Ivo J.M.M
.005
a	20080108154052
.260
a
b
c	0000
.084
a	621.381 7 RAA
.300
a	x, 141 hlm.: Ganb., Tab.
b	22 cm.
c	x, 141 hlm.: Ganb., Tab.; 22 cm.
.336
a	Book