.245
a	Fabrikasi sel surya a-Si
b	: H doping-Delta dengan plasma enchanced chemical vapor deposition (PECVD)
h	Tugas Akhir Thesis-ITB
.100
a	BAHTIAR, Ayi
.005
a	20080513123123
.260
a	Bandung
b	Program Magister Fisika ITB
c	1997
.041
a	Indonesia
.084
a	621.31244 BAH
.300
a	viii, 52 halaman : gambar, tabel
b	21 centimeter.
c	viii, 52 halaman : gambar, tabel ; 21 centimeter.
.336
a	Tugas Akhir Thesis-ITB