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a	Patterned multipixel membrane mirror MEMS optically addressed spatial light modulator with megahertz response
h	Artikel
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a	1041-1135
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a	20070608105858
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a	Park Avenue, USA
b	Institute Of Electrical and Electronics Engineers
c	2007
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a	Inggris
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a	621
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a	hlm.173-175
b	hlm.173-175
c	hlm.173-175
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a	IEEE : Photonics Technology Letters
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a	Artikel